EDN's 19th Annual Innovation Awards Finalists
-- EDN, February 2, 2009
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&& PREVIOUS FINALIST | MAIN | NEXT FINALIST >> Category: Design for Test, Production Test, and Metrology Finalist: AVS300CL wireless metrology tool (CyberOptics Semiconductor)  The Auto Vibration System (AVS) 300CL is a wireless, wafer-like device that gives fab engineers real-time insight into the acceleration and vibration of their wafer-processing equipment, providing them with the set of precise wafer processing metrology data that enables them to improve processes and productivity. Even the smallest movements can disrupt the deposition uniformity of a microscopic film layer on a semiconductor wafer. Vibrations can also be the result of contact to surfaces, which lower yield due to scratches and uncontrolled wafer movement—and all the tools in a fab generate vibrations and g-forces. The AVS300CL travels—just as a wafer would—through tools and automation equipment without disruption. The device tells engineers in real-time exactly what vibrations the wafer experiences in the process. The device’s sensor tracks accelerations and vibrations in all three axes. |
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