Rudolph Technologies Does Business in Asia
Staff Reporter -- EDN, July 11, 2006
Process control metrology, defect inspection and data analysis systems provider Rudolph Technologies Inc. has sold multiple AXi 935 Macro Defect Inspection Systems to an unnamed "major foundry" in Asia.
The Flanders, New Jersey-based company made the announcement today during the Semicon West trade show, one of the capital equipment industry’s most relevant events, held this year in San Francisco.
The systems are destined for a Singapore facility where they will initially support etch processes and outgoing quality assurance, the company said. Additionally, Rudolph said, the same customer is evaluating AXi performance at a second fab in Taiwan.
"We are very excited to have won this major sale," Roger Lao, Rudolph general manager in Singapore and China, said in a statement. "The customer required a thorough performance evaluation, and our AXi System met their combined needs for throughput, resolution and ease-of-use."
The company said that its AXi 935 Inspection System has higher throughput than micro tools and higher resolution than other macro tools.
Compared to its predecessor, the AXi 930, the company asserted that the 935 offers significantly improved throughput while maintaining the sensitivity to detect defects down to 0.5 micrometers.
