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MEMS-design software provides EDA approach

By Gabe Moretti -- EDN, July 8, 2004

The integration of electronic and mechanical parts of a system has always been a challenge for designers. Normally, teams using different tools design the two portions of the system, and the integration process often occurs only after the vendor fabricates the devices. Developing a computer model of a system requires using approximations that can lead to inaccurate simulation results when dealing with nanometer processes. Yet, the drive to increase the integration and miniaturizations of systems in products such as automobiles and cameras is increasing the need for system simulation before the mechanical and electronic components go to manufacturing.

To address these challenges, Coventor, a provider of tools for the development of MEMS (micro-electromechanical systems), microfluidics, and semiconductor-process applications, has released CoventorWare suite. The tools allow developers to combine MEMS models with electronic models they designed in either Cadence (www.cadence.com) Virtuoso or Synopsys (www.synopsys.com) Saber environments. CoventorWare comprises products to create, model, analyze, and integrate MEMS devices.

The Architect, Designer, Analyzer, and Integrator tools support the development of sensor, actuator, RF, and microfluidic MEMS. The Architect library contains new models, including-beam actuator models that cover thermally or piezoelectric-actuated devices, such as mirrors, and membrane models for modeling pressure sensors. Designer includes enhanced lay-out-editor features, including design-rule checks for small edges and file-transfers options.

Analyzer has new capabilities, including postprocessing options for designing piezoelectric RF resonators and enhanced electro wetting on dielectric and micro-heater analysis for microdroplet applications. You use Integrator to export reduced-order macromodels of MEMS to the Virtuoso or the Saber environment.

Prices for CoventorWare range from $25,000 to $100,000, depending on the configuration. The tools operate on both Windows and Solaris operating systems.

Coventor, 1-919-657-8114, www.coventor.com.

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