Need a new lithography textbook?
From lithography expert Chris Mack:
“To all who are interested in learning more about lithography (and let’s face it, who isn’t!):
My new graduate-level textbook on lithography has just been published by John Wiley & Sons and is now available:
Fundamental Principles of Optical Lithography: The Science of Microfabrication
Here are some statistics about the book:
10 chapters and 3 appendices
515 pages
272 figures
132 homework problems
972 numbered equations
17 years of my life spent writing it
$200 for hardcover, $80 for paperback (hey, I didn’t come up with these prices!)
I’m biased, but I think this will be the definitive book on the science of optical lithography. Click on the link to see the Table of Contents and other information about the book.”
I did check out some sample problems on Chris’ website and if anyone can help me with the answers, let me know!
Want to read more recent articles about lithography on EDN.com? Check these out:
Why design engineers need to know about lithography
Why design engineers need to know about lithography, part 2
Applied unveils wafer inspection tool for 45 nm immersion litho
ASE to leverage SUSS MicroTec’s litho equipment in wafer level packaging ops
Details emerging on Intel’s 45nm process: can it be fast?
All lithography articles on EDN.com
